ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,331, issued on Nov. 3, was assigned to TRICORNTECH Corp. (New Taipei City, Taiwan).
"System and method for in-line monitoring of airborne contamination and process health" was invented by Tsung-Kuan A. Chou (San Jose, Calif.), Pei-Wen Chung (Taipei City, Taiwan) and Li-Peng Wang (Taipei City, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure describes embodiments of an airborne molecular contamination (AMC) monitoring apparatus. The AMC apparatus includes a manifold having a plurality of inlets and one or more outlets. A sampling tube bus fluidly is coupled to the manifold, the sampling tube bus comprising a plurality of individual...