US Patent Issued to Toto on Sept. 15 for "Semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,460, issued on Sept. 15, was assigned to Toto Ltd. (Fukuoka, Japan).

"Semiconductor manufacturing apparatus" was invented by Yasutaka Nitta (Kitakyushu, Japan), Takuma Wada (Kitakyushu, Japan) and Ryoto Takizawa (Kitakyushu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment, a semiconductor manufacturing apparatus member includes a base and a particle-resistant layer. The base includes a first surface, a second surface crossing the first surface, and an edge portion connecting the first surface and the second surface. The particle-resistant layer includes a polycrystalline ceramic and covering the first surface, the s...