ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,697,691, issued on Aug. 4, was assigned to Toto Ltd. (Fukuoka, Japan).
"Electrostatic chuck" was invented by Akihito Ono (Kitakyushu, Japan), Masafumi Ikeguchi (Kitakyushu, Japan), Tomoki Umetsu (Kitakyushu, Japan) and Jumpei Uefuji (Kitakyushu, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direct...