US Patent Issued to Tokyo Keiki on Nov. 3 for "Method for manufacturing curved surface support structure, and hemispherical resonator gyroscope" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,780,651, issued on Nov. 3, was assigned to Tokyo Keiki Inc. (Tokyo).

"Method for manufacturing curved surface support structure, and hemispherical resonator gyroscope" was invented by Takayoshi Yamaguchi (Tokyo) and Kazuaki Tani (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "One embodiment comprises: forming an annular recess on an upper surface of a lower wafer, and a stem having a tip higher than at a radially-outer-surface a generally center of the recess; forming first electrodes arranged on the radially-outer-surface; forming a sacrificial layer; forming second electrodes arranged on a bottom surface of an upper wafer; bonding the upper wafer...