US Patent Issued to Tokyo Electron on Sept. 8 for "Surface relief grating performance and cost enhancements for augmented reality applications" (Texas, New York Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,265, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Surface relief grating performance and cost enhancements for augmented reality applications" was invented by Ryan Burns (Austin, Texas), Michael Carcasi (Austin, Texas) and Robert Brandt (Albany, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure provide a method for fabricating a grating coupler. For example, the method can include providing a substrate, forming a plurality of grating elements and a photosensitive material above the substrate, and projecting actinic radiation of varied intensities to expose different regions of the photosensitiv...