US Patent Issued to Tokyo Electron on Sept. 29 for "Advanced OES characterization" (New York, California Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,749,664, issued on Sept. 29, was assigned to Tokyo Electron Ltd. (Tokyo).

"Advanced OES characterization" was invented by Sergey Voronin (Albany, N.Y.), Francisco Machuca (Fremont, Calif.), Blaze Messer (Albany, N.Y.), Yan Chen (Fremont, Calif.), Ying Zhu (Fremont, Calif.), Mihail Mihaylov (Fremont, Calif.), Joel Ng (Fremont, Calif.), Ashawaraya Shalini (Fremont, Calif.), Da Song (Albany, N.Y.) and Akiteru Ko (Albany, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing system that includes: a processing chamber configured to hold a substrate to be processed; a first vacuum pump; a second vacuum pump disposed downstream from the first vacuu...