US Patent Issued to Tokyo Electron on Sept. 22 for "Information processing system, power adjustment method, and heat treatment apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,745,589, issued on Sept. 22, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing system, power adjustment method, and heat treatment apparatus" was invented by Masakazu Yamamoto (Iwate, Japan), Tadashi Enomoto (Iwate, Japan) and Hiroyuki Karasawa (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing system includes a heat treatment apparatus that forms a film on a processing target substrate by using a heating unit that heats the processing target substrate inside a processing container, and an information processing apparatus that controls power supplied to the heating part, the information process...