US Patent Issued to Tokyo Electron on Sept. 22 for "Information collection device for substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,075, issued on Sept. 22, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information collection device for substrate processing apparatus" was invented by Yutai Matsuhashi (Iwate, Japan), Tsutomu Sugawara (Iwate, Japan), Shigehisa Hayashi (Yamanashi, Japan) and Tadashi Enomoto (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatu...