US Patent Issued to Tokyo Electron on Sept. 15 for "Processing apparatus, and installing method of processing tool of processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,734,631, issued on Sept. 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Processing apparatus, and installing method of processing tool of processing apparatus" was invented by Yasutaka Mizomoto (Kikuchi-gun, Japan) and Susumu Hayakawa (Kikuchi-gun, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover inclu...