US Patent Issued to Tokyo Electron on Sept. 1 for "Radio frequency sensor calibration by virtual metrology" (California, Oregon, Texas Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,724,395, issued on Sept. 1, was assigned to Tokyo Electron Ltd. (Tokyo).

"Radio frequency sensor calibration by virtual metrology" was invented by Jun Shinagawa (Fremont, Calif.), Barton Lane (Austin, Texas), Merritt Funk (Austin, Texas), Shinichi Kozuka (Hillsboro, Ore.) and Masashi Kanda (Hillsboro, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of chamber matching is provided. A first virtual metrology (VM) model is configured to predict a first thickness change rate (TCR) for executing a plasma recipe in a first chamber. A second VM model is configured to predict a second TCR for executing the plasma recipe in a second chamber. The pla...