US Patent Issued to Tokyo Electron on Oct. 20 for "Testing apparatus and testing method" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,768,799, issued on Oct. 20, was assigned to Tokyo Electron Ltd. (Tokyo).

"Testing apparatus and testing method" was invented by Hiroyuki Nakayama (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection apparatus for inspecting an inspection target device formed on an inspection target object. The inspection apparatus comprises a placing table configured to support the inspection target object. The placing table includes a transparent placing surface and an irradiation part disposed below the placing surface. The irradiation part includes a light guiding plate having a facing surface facing the inspection target object, and a light...