ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,766,434, issued on Oct. 20, was assigned to Tokyo Electron Ltd. (Tokyo).
"Solvent vapor supply apparatus and solvent vapor supply method" was invented by Yuichiro Miyata (Koshi City, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A solvent vapor supply apparatus is for supplying solvent vapor to a substrate treatment. The solvent vapor supply apparatus includes a solvent storage which is kept warm at a temperature equal to or higher than a saturation temperature of a solvent stored therein; a precooler which precools the solvent vapor generated in the solvent storage; and a temperature regulator which regulates a temperature of the precooled solve...