US Patent Issued to Tokyo Electron on Oct. 20 for "Coating and developing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. D1,154,736, issued on Oct. 20, was assigned to Tokyo Electron Ltd. (Tokyo).

"Coating and developing apparatus" was invented by Masashi Tsuchiyama (Koshi City, Japan), Hiromitsu Maejima (Tokyo) and Naruaki Iida (Koshi City, Japan).

The patent was filed on Jan. 14, 2025, under Application No. D/984,288.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=D1154736&OS=D1154736&RS=D1154736

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