US Patent Issued to Tokyo Electron on Nov. 3 for "Processing apparatus and alignment method" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,692, issued on Nov. 3, was assigned to Tokyo Electron Ltd. (Tokyo).

"Processing apparatus and alignment method" was invented by Kiyoshi Mori (Fuchu City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus includes: a processing container having a plurality of processing spaces formed in the processing container; a rotary arm including a rotational shaft located at a central portion of the processing container and a plurality of end effectors configured to rotate around the rotational shaft and to hold a plurality of wafers which is equal in number to the plurality of processing spaces; and a sensor configured to detect positi...