US Patent Issued to Tokyo Electron on May 26 for "Evaluation apparatus, evaluation method, and evaluation program" (Japanese, American Inventors)

ALEXANDRIA, Va., May 26 -- United States Patent no. 12,639,485, issued on May 26, was assigned to Tokyo Electron Ltd. (Tokyo).

"Evaluation apparatus, evaluation method, and evaluation program" was invented by Daishiro Akiyama (Albany, N.Y.), Yusuke Ogawa (Hokkaido, Japan), Tsuyoshi Mizuuchi (Hokkaido, Japan), Takahiko Kato (Miyagi, Japan), Tomoki Komatsu (Tokyo), Kosuke Nakago (Tokyo), Yuhei Otomo (Tokyo) and Kohji Liu (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An evaluation apparatus includes a processor that performs operations including reading a simulation parameter of a topography simulator and first range information or second range information that are associated with each other, the simula...