US Patent Issued to Tokyo Electron on May 19 for "Method of controlling rotary table and processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,630,927, issued on May 19, was assigned to Tokyo Electron Ltd. (Tokyo).

"Method of controlling rotary table and processing apparatus" was invented by Takeshi Kobayashi (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of controlling a processing apparatus includes providing the processing apparatus including a chamber; a rotary table accommodated within the chamber, including a stage on which a plurality of substrates is to be placed, and rotatable and movable in an up and down direction; a heater provided below the rotary table; and a temperature sensor that measures a temperature of the rotary table. The method further includes acqu...