US Patent Issued to Tokyo Electron on March 24 for "Shower head electrode assembly and plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,763, issued on March 24, was assigned to Tokyo Electron Ltd. (Tokyo).

"Shower head electrode assembly and plasma processing apparatus" was invented by Ryosuke Kumagai (Miyagi, Japan), Hidetoshi Hanaoka (Miyagi, Japan) and Fumiaki Ariyoshi (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a shower head electrode assembly of a plasma processing apparatus, comprising: an electrode having a plurality of first gas flow paths and having a surface exposed to plasma; and a backing member attached to the electrode and having a plurality of second gas flow paths which communicate with the plurality of first gas flow paths. Each ...