US Patent Issued to Tokyo Electron on March 24 for "Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,467, issued on March 24, was assigned to Tokyo Electron Ltd. (Tokyo).

"Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber" was invented by Ivan Maleev (Fremont, Calif.), Shin-Yee Lu (Fremont, Calif.), Dimitri Klyachko (Fremont, Calif.), Ching Ling Meng (Sunnyvale, Calif.) and Xinkang Tian (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing semiconductor devices includes repeatedly performing a transfer operation which transfers each of a plurality of semiconductor wafers between a substrate handling module and a processing chamber through a wafer access por...