US Patent Issued to Tokyo Electron on March 17 for "Device and method for determining wafer bow" (New York, Texas, Florida Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,898, issued on March 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Device and method for determining wafer bow" was invented by Daniel Fulford (Albany, N.Y.), Mark I. Gardner (Austin, Texas) and H. Jim Fulford (Marianna, Fla.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for measuring bow of a wafer includes a substrate holder including a support surface configured to support a wafer, and an air flow system including a plurality of air outlets in the support surface which are configured to output air for elevating the wafer above the substrate holder. A capacitor array unit including a plurality of electrodes laterally spaced from...