US Patent Issued to Tokyo Electron on June 30 for "Device and method for determining wafer bow" (New York, Texas, Florida Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,669,321, issued on June 30, was assigned to Tokyo Electron Ltd. (Tokyo).

"Device and method for determining wafer bow" was invented by Daniel Fulford (Albany, N.Y.), Mark I. Gardner (Austin, Texas), Henry Jim Fulford (Marianna, Fla.) and Anton Devilliers (Albany, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for measuring bow of a wafer, includes a substrate holder having a support surface configured to support a wafer; and a capacitor array unit including a plurality of electrodes laterally spaced from one another in the capacitor array unit. Each electrode faces the support surface and is spaced a respective fixed distance from the ...