ALEXANDRIA, Va., July 15 -- United States Patent no. 12,664,330, issued on June 23, was assigned to Tokyo Electron Ltd. (Tokyo).
"Information processing system and simulation method" was invented by Masakazu Yamamoto (Iwate, Japan) and Tadashi Enomoto (Iwate, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing system includes: a physical sensor data acquisition unit configured to acquire physical sensor data measured by a semiconductor manufacturing apparatus that executes a process according to a process parameter; a simulation execution unit configured to execute a simulation by a simulation model of the semiconductor manufacturing apparatus according to the process parameter and...