US Patent Issued to Tokyo Electron on July 7 for "Reflecting non-planar surfaces integrated with laser scan for Poseidon tool integration" (Florida, Texas, New York Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,674,765, issued on July 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Reflecting non-planar surfaces integrated with laser scan for Poseidon tool integration" was invented by H. Jim Fulford (Marianna, Fla.), Daniel Fulford (Albany, N.Y.) and Mark I. Gardner (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure provide an apparatus. For example, the apparatus can include a wafer holder for holding a wafer, a light reflection device located beside a wafer edge and having a light reflection surface tilted with respect to a wafer surface, and a coherent light source for generating incident light to perform a scan ...