US Patent Issued to Tokyo Electron on July 7 for "Method of controlling substrate transfer system" (Japanese Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,632, issued on July 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Method of controlling substrate transfer system" was invented by Kosuke Kinoshita (Yamanashi, Japan) and Takashi Sugimoto (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method of controlling a substrate transfer system transferring substrates by controlling a first transfer device and a second transfer device comprising: a process of acquiring process module-specific substrate transfer positions for each of the plurality of process modules, wherein the process module-specific substrate transfer positions are substrate transfer positions of the mountin...