US Patent Issued to Tokyo Electron on July 21 for "Movable coolant processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,331, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Movable coolant processing apparatus" was invented by Hayato Sakai (Kurokawa-gun, Japan), Takehiko Arita (Kurokawa-gun, Japan), Haruka Kaneko (Kurokawa-gun, Japan) and Satoshi Suzuki (Kurokawa-gun, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature control medium processing apparatus configured to collect a temperature control medium from a module using the temperature control medium or refill the module with the temperature control medium includes a tank configured to store the temperature control medium therein; a first inlet path which is connected to a first in...