US Patent Issued to Tokyo Electron on July 21 for "Ignition condition calculation method and plasma processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,689,012, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Ignition condition calculation method and plasma processing apparatus" was invented by Morihito Inagaki (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An ignition condition calculation method includes (A) searching for ignition condition information including first plasma state information when a plasma is ignited under a preset ignition condition, and storing the ignition condition information in a storage; (B) searching for misfire condition information including second plasma state information when the plasma misfires after the plasma has been ignited, and sto...