US Patent Issued to Tokyo Electron on July 21 for "Detection device and detection method" (Japanese Inventor)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,381, issued on July 21, was assigned to Tokyo Electron Ltd. (Tokyo).

"Detection device and detection method" was invented by Wataru Matsumoto (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detection device according to one embodiment of the present disclosure includes an elastic member, a measuring part and a detection part. The elastic member is disposed between a first member and a second member at a bonding portion where the first member and the second member are bonded and the elastic member is configured to be elastically deformable. The measuring part is configured to measure electrical characteristics at multiple locations...