US Patent Issued to Tokyo Electron on July 14 for "High-performance adaptable sampling system" (Texas Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,135, issued on July 14, was assigned to Tokyo Electron Ltd. (Tokyo).

"High-performance adaptable sampling system" was invented by Charles Schlechte (Austin, Texas), Jianping Zhao (Austin, Texas) and Michael Hummel (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to an embodiment, a plasma processing system is proposed. The plasma processing system includes a processing chamber for plasma; a two-chambered pumping block linked to the chamber through an orifice that creates a particle beam via a pressure difference, with the upper pressure regulated by a connected vacuum pump; a detector stage attached to the pumping block throug...