US Patent Issued to Tokyo Electron on Feb. 17 for "Processing apparatus for forming a coating film on a substrate having a camera and a mirror member" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,608, issued on Feb. 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Processing apparatus for forming a coating film on a substrate having a camera and a mirror member" was invented by Yasuaki Noda (Koshi, Japan) and Tadashi Nishiyama (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing method including a step that takes an image of the end face of a reference substrate, whose warp amount is known, over the whole periphery thereof using a camera to obtain shape data of the end face of the reference substrate; a step that takes an image of the end face of a process substrate over the whole periphery thereof using a camera to obt...