US Patent Issued to Tokyo Electron on Feb. 17 for "Linearly moving mechanism and method of suppressing particle scattering" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,591, issued on Feb. 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Linearly moving mechanism and method of suppressing particle scattering" was invented by Masami Akimoto (Koshi, Japan), Naruaki Iida (Koshi, Japan), Tsunenaga Nakashima (Koshi, Japan), Keisuke Sasaki (Koshi, Japan), Takahiro Yasutake (Koshi, Japan), Kazuya Matsushita (Koshi, Japan), Kousei Ide (Koshi, Japan) and Masato Ozeki (Koshi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A linearly moving mechanism includes an internal moving body provided within a case body and configured to be moved in a linear direction, the internal moving body being configured to move an externa...