US Patent Issued to Tokyo Electron on Feb. 17 for "Holder temperature detection method, holder monitoring method and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,553,845, issued on Feb. 17, was assigned to Tokyo Electron Ltd. (Tokyo).

"Holder temperature detection method, holder monitoring method and substrate processing apparatus" was invented by Einstein Noel Abarra (Tokyo) and Hiroaki Chihaya (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A holder temperature detection method which measures a temperature of a rotatable holder that holds a substrate is provided. The method comprises a step of irradiating a fluorescent body thermally mounted on the holder with a light pulse having a first wavelength, a step of detecting fluorescence having a second wavelength emitted from the fluorescent body ...