US Patent Issued to Tokyo Electron on Aug. 18 for "Semiconductor manufacturing apparatus and component for semiconductor manufacturing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,157, issued on Aug. 18, was assigned to Tokyo Electron Ltd. (Tokyo).

"Semiconductor manufacturing apparatus and component for semiconductor manufacturing apparatus" was invented by Naoyuki Satoh (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes: a processing chamber; a substrate support provided in the processing chamber and configured to hold a substrate; a plate facing the substrate support and having a gas introduction port; and a cylindrical member configured to support the plate and surround a periphery of the substrate. The plate...