US Patent Issued to Tokyo Electron on Aug. 18 for "Seasoning method and plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,165, issued on Aug. 18, was assigned to Tokyo Electron Ltd. (Tokyo).

"Seasoning method and plasma processing apparatus" was invented by Yusuke Shimizu (Kurokawa-gun, Japan), Satoru Nakamura (Kurokawa-gun, Japan), Toshihisa Ozu (Kurokawa-gun, Japan) and Naoki Matsumoto (Kurokawa-gun, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A seasoning method implemented in a plasma processing apparatus is provided. The plasma processing apparatus comprises a chamber and an electrostatic chuck, the electrostatic chuck including a central region which supports a substrate and an annular region which surrounds the central region and supports a ring assembly...