ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,389, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Toyko, Japan).
"Measurement method and measurement system" was invented by Hikaru Fujiwara (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement method according to an exemplary embodiment acquires a measured value indicating a capacitance between a measuring instrument and an edge ring in a chamber. The measuring instrument includes a base substrate and a sensor electrode provided on the base substrate. The method includes holding, on a stage in the chamber, the edge ring having a conductive film formed on a surface thereof. The method includes transporting the measu...