ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,280, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Tokyo).
"Detection device, processing system, and transfer method" was invented by Norihiko Amikura (Miyagi, Japan) and Masatomo Kita (Miyagi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a detection device for detecting position misalignment of an object to be transferred with respect to a transfer mechanism. The detection device comprises: an image sensor configured to capture images including the transfer mechanism and the object to be transferred which is held by the transfer mechanism; and a calculation unit configured to calculate an amount of position misal...