US Patent Issued to Tokyo Electron on Aug. 11 for "Data collection system, data collection apparatus, data collection method, and data collection program" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,926, issued on Aug. 11, was assigned to Tokyo Electron Ltd. (Tokyo).

"Data collection system, data collection apparatus, data collection method, and data collection program" was invented by Tsuyoshi Moriya (Tokyo), Hironori Moki (Miyagi, Japan), Kazuya Uoyama (Hokkaido, Japan), Takahito Matsuzawa (Hokkaido, Japan) and Yuki Kataoka (Hokkaido, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A data collection system includes: a first substrate processing apparatus having a first processing space, a second substrate processing apparatus having a second processing space, and a data collection apparatus connected to the first substrate processing app...