US Patent Issued to Tokyo Electron on April 7 for "Path setting system, path setting method, and software" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,598,945, issued on April 7, was assigned to Tokyo Electron Ltd. (Tokyo).

"Path setting system, path setting method, and software" was invented by Yoshinori Iguchi (Yamanashi, Japan) and Takehiro Shindo (Yamanashi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A path setting system is used for setting paths of a plurality of transfer bodies in a substrate transfer device, the substrate transfer device including a substrate transfer area and the plurality of transfer bodies, each having a support configured to support a substrate and configured to float and move by a magnetic force from a floor forming the substrate transfer area. The path setting ...