ALEXANDRIA, Va., April 7 -- United States Patent no. 12,595,562, issued on April 7, was assigned to Tokyo Electron Ltd. (Tokyo).
"Heat treatment apparatus" was invented by Yoshitaka Miura (Iwate, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A heat treatment apparatus includes: a processing container having a roof in a cylindrical shape and a lower end opening, and in which a first space is formed; a lid for closing the lower end opening; a support including a shaft portion and a placement portion; a boat installed on the placement portion to vertically hold substrates; a partitioning member provided around the shaft portion with a gap left from a lower surface of the placement portion to form a secon...