ALEXANDRIA, Va., April 15 -- United States Patent no. 12,599,922, issued on April 14, was assigned to Tokyo Electron Ltd. (Tokyo).
"System and method for liquid dispense and coverage control" was invented by Mirko Vukovic (Albany, N.Y.), Daniel Fulford (Albany, N.Y.) and Anton J. Devilliers (Albany, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Light can be used to monitor coating a liquid on a substrate. By directing the light to a spot on the substrate, when the liquid passes through the spot, some light will be reflected, while some light will be scattered. Monitoring this behavior can indicate whether a substrate has been successfully coated with the liquid, as well as identifying defects. Further,...