US Patent Issued to ThinSiC on Feb. 24 for "Cleaning wide bandgap epitaxial susceptors and method therefor" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,011, issued on Feb. 24, was assigned to ThinSiC Inc. (Santa Clara, Calif.).

"Cleaning wide bandgap epitaxial susceptors and method therefor" was invented by Tirunelveli Subramaniam Ravi (San Jose, Calif.) and Ashraf Ahmed Eldakrouri (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor configured to hold one or more WBG (Wide Bandgap) semiconductor wafers for epitaxial layer growth to support a manufacture of at least one WBG semiconductor device. A susceptor is removed from an epitaxial reactor when a predetermined thickness of polycrystalline WBG semiconductor material builds up from growing epitaxial layers on one or mor...