US Patent Issued to TEXAS INSTRUMENTS on Oct. 27 for "Integrated circuit having improved ASML alignment marks" (Texas Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,945, issued on Oct. 27, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Integrated circuit having improved ASML alignment marks" was invented by Stephen Arlon Meisner (Allen, Texas), James Thomas Hallowell (Frisco, Texas) and Michael Todd Wyant (Dallas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A photo alignment structure is provided that includes a wafer having scribe lines defined therein in a top planar surface of the wafer. An alignment structure is disposed on a top planar surface of the wafer longitudinally aligned with a portion of selected scribe lines, where the alignment structure is comprised of metal layers. A slot is defined along...