US Patent Issued to TEXAS INSTRUMENTS on March 3 for "Bird's beak profile of field oxide region" (Texas, California Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,568,647, issued on March 3, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Bird's beak profile of field oxide region" was invented by Jingjing Chen (San Jose, Calif.), Ming-Yeh Chuang (McKinney, Texas), Guruvayurappan Mathur (Allen, Texas), James Todd (Plano, Texas), Ronald Chin (Dallas) and Thomas Lillibridge (Plano, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure generally relates to a bird's beak profile of a field oxide region. In an example, a semiconductor device structure includes a semiconductor substrate, a dielectric oxide layer, and a field oxide region. The semiconductor substrate has a top surface. The dielect...