ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,164, issued on March 17, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).
"Semiconductor processing tool cleaning" was invented by Gregory McKee (Riverton, Utah) and David Claar (Draper, Utah).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure generally relates to semiconductor processing tool cleaning, such as may be included in semiconductor processing for manufacturing an integrated circuit (IC). In an example, a cleaning process is performed on an interior surface of a chamber of a semiconductor processing tool. The cleaning process includes flowing a reactive gas into an interior volume of the chamber. The interior volume is ...