US Patent Issued to TEXAS INSTRUMENTS on June 30 for "Monolithic humidity sensor devices and methods of manufacture" (Texas Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,669,461, issued on June 30, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Monolithic humidity sensor devices and methods of manufacture" was invented by Ricky Alan Jackson (Richardson, Texas) and Wai Lee (Dallas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Monolithic humidity sensor devices, and methods of manufacture. The devices include circuitry on or over a silicon substrate. A primary passivation barrier is formed over the circuitry with conductive vias therethrough; a capacitor, comprising metal fingers with spaces therebetween, is formed above said primary passivation barrier and electrically coupled by the conductive vias to the circuitry....