US Patent Issued to TEXAS INSTRUMENTS on July 7 for "Systems and methods to reduce stiction in MEMS devices" (Texas Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,674,973, issued on July 7, was assigned to TEXAS INSTRUMENTS Inc. (Dallas).

"Systems and methods to reduce stiction in MEMS devices" was invented by Lisa Wesneski (Dallas), Toby Linder (Dallas) and Timothy Patterson (Dallas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods to reduce stiction in MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate; a via supported by the substrate, the via comprising a first metal layer comprising a material; an arm extending away from and supported by the via, the arm comprising the material; and a second metal layer within the via on the first metal layer, where...