ALEXANDRIA, Va., May 19 -- United States Patent no. 12,629,702, issued on May 19, was assigned to TES Co. LTD (Yongin-si, South Korea).
"Showerhead assembly and substrate processing apparatus" was invented by Kyung-Ho Jang (Yongin-si, South Korea), Byeong-Ho Yun (Yongin-si, South Korea) and Min-Wook Kang (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process."
The patent was file...