ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,233, issued on Sept. 8, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Semiconductor device and manufacturing method thereof" was invented by Shu-Uei Jang (Hsinchu, Taiwan), Chung-Shu Wu (Taoyuan, Taiwan) and Ya-Wei Liao (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor fabrication method includes: forming, on a substrate, an epitaxial stack comprising at least one sacrificial epitaxial layer and at least one channel epitaxial layer; forming a fin in the epitaxial stack; forming a sacrificial gate stack on channel regions of the fin; forming gate sidewall spacers on sidewalls of the ...