US Patent Issued to Taiwan Semiconductor Manufacturing on Sept. 8 for "Inspection tool for a semiconductor processing tool and methods of use" (Taiwanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,381, issued on Sept. 8, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Inspection tool for a semiconductor processing tool and methods of use" was invented by Ming-Hsun Tsai (Hsinchu City, Taiwan), Cheng-Hao Lai (Taichung City, Taiwan), Shang-Chieh Chien (New Taipei City, Taiwan), Li-Jui Chen (Hsinchu City, Taiwan) and Heng-Hsin Liu (New Taipei City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer table inspection tool described herein is capable of being positioned over a wafer table while the wafer table is positioned in a bottom module of an exposure tool of a lithography system. The wafer table insp...