US Patent Issued to Taiwan Semiconductor Manufacturing on Sept. 1 for "Semiconductor device, method and tool of manufacture" (Taiwanese Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,727,432, issued on Sept. 1, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Semiconductor device, method and tool of manufacture" was invented by Shih-Yu Chang (Yunlin County, Taiwan), Chien-Han Chen (Nantou County, Taiwan), Chien-Chih Chiu (Xinying City, Taiwan) and Chi-Che Tseng (Taoyuan City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor devices, methods of manufacturing the semiconductor device and tools are disclosed herein. Some methods include providing an electrostatic chuck and placing an edge ring adjacent to the electrostatic chuck. The electrostatic chuck includes a first electrode to gen...