US Patent Issued to TAIWAN SEMICONDUCTOR MANUFACTURING on March 17 for "Liquid storage for facility chemical supply system" (Taiwanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,897, issued on March 17, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).

"Liquid storage for facility chemical supply system" was invented by Tzu-Yang Lin (Hsinchu, Taiwan), Cheng-Han Wu (Hsinchu, Taiwan), Chen-Yu Liu (Hsinchu, Taiwan), Kuo-Shu Tseng (Hsinchu, Taiwan), Shang-Sheng Li (Hsinchu, Taiwan), Chen Yi Hsu (Hsinchu, Taiwan) and Yu-Cheng Chang (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A lithography includes a storage tank that stores process chemical fluid, an anti-collision frame, and an integrated sensor assembly. The storage tank includes a dispensing port positioned at a lowest par...