US Patent Issued to Taiwan Semiconductor Manufacturing on June 9 for "Control of environment within processing modules" (Taiwanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,984, issued on June 9, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Control of environment within processing modules" was invented by Jhih-Yu Li (Hsinchu, Taiwan), Nai-Han Cheng (Hsinchu, Taiwan) and Chien-Hung Lu (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatuses for adjusting and controlling conditions within the environment of a workpiece handling module include sensors for detecting humidity and concentration of harmful gasses. Signals generated by these sensors are utilized to generate signals that control the flow of air into the environment and/or the flow of air and gases...